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Fabrication of nanochannels with ladder nanostructure at the bottom using AFM nanoscratching method
This letter presents a novel atomic force microscopy (AFM)-based nanomanufacturing method combining the tip scanning with the high-precision stage movement to fabricate nanochannels with ladder nanostructure at the bottom by continuous scanning with a fixed scan size. Different structures can be obt...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2014
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4039066/ https://www.ncbi.nlm.nih.gov/pubmed/24940171 http://dx.doi.org/10.1186/1556-276X-9-212 |