Thermally controlled widening of droplet etched nanoholes

We describe a method to control the shape of nanoholes in GaAs (001) which combines the technique of local droplet etching using Ga droplets with long-time thermal annealing. The cone-like shape of inverted nanoholes formed by droplet etching is transformed during long-time annealing into widened ho...

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Detalles Bibliográficos
Autores principales: Heyn, Christian, Schnüll, Sandra, Jesson, David E, Hansen, Wolfgang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2014
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4053582/
https://www.ncbi.nlm.nih.gov/pubmed/24948902
http://dx.doi.org/10.1186/1556-276X-9-285

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4053582/
https://www.ncbi.nlm.nih.gov/pubmed/24948902
http://dx.doi.org/10.1186/1556-276X-9-285

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