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Fabrication and characterization of well-aligned plasmonic nanopillars with ultrasmall separations
We show the fabrication of well-aligned gold and silver nanopillars with various array parameters via interference lithography followed by ion beam milling and compare the etching rates of these two metallic materials. Silver is suitable for fabricating ultrafine arrays with ultrasmall separations d...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4061926/ https://www.ncbi.nlm.nih.gov/pubmed/24959111 http://dx.doi.org/10.1186/1556-276X-9-299 |