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Hole-mask colloidal nanolithography combined with tilted-angle-rotation evaporation: A versatile method for fabrication of low-cost and large-area complex plasmonic nanostructures and metamaterials

Many nano-optical applications require a suitable nanofabrication technology. Hole-mask colloidal nanolithography has proven to be a low-cost and large-area alternative for the fabrication of complex plasmonic nanostructures as well as metamaterials. In this paper, we describe the fabrication proces...

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Detalles Bibliográficos
Autores principales: Zhao, Jun, Frank, Bettina, Neubrech, Frank, Zhang, Chunjie, Braun, Paul V, Giessen, Harald
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2014
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4077317/
https://www.ncbi.nlm.nih.gov/pubmed/24991494
http://dx.doi.org/10.3762/bjnano.5.68