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Study of Multi-level Characteristics for 3D Vertical Resistive Switching Memory
Three-dimensional (3D) integration and multi-level cell (MLC) are two attractive technologies to achieve ultra-high density for mass storage applications. In this work, a three-layer 3D vertical AlO(δ)/Ta(2)O(5-x)/TaO(y) resistive random access memories were fabricated and characterized. The vertica...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4105739/ https://www.ncbi.nlm.nih.gov/pubmed/25047906 http://dx.doi.org/10.1038/srep05780 |