Platinum metallization for MEMS application: Focus on coating adhesion for biomedical applications

The adherence of Platinum thin film on Si/SiO(2) wafer was studies using Chromium, Titanium or Alumina (Cr, Ti, Al(2)O(3)) as interlayer. The adhesion of Pt is a fundamental property in different areas, for example in MEMS devices, which operate at high temperature conditions, as well as in biomedic...

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Detalles Bibliográficos
Autores principales: Guarnieri, Vittorio, Biazi, Leonardo, Marchiori, Roberto, Lago, Alexandre
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Landes Bioscience 2014
Materias:
Report
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4122564/
https://www.ncbi.nlm.nih.gov/pubmed/24743057
http://dx.doi.org/10.4161/biom.28822

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4122564/
https://www.ncbi.nlm.nih.gov/pubmed/24743057
http://dx.doi.org/10.4161/biom.28822

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