Tuning of strain and surface roughness of porous silicon layers for higher-quality seeds for epitaxial growth

Sintered porous silicon is a well-known seed for homo-epitaxy that enables fabricating transferrable monocrystalline foils. The crystalline quality of these foils depends on the surface roughness and the strain of this porous seed, which should both be minimized. In order to provide guidelines for a...

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Detalles Bibliográficos
Autores principales: Karim, Marwa, Martini, Roberto, Radhakrishnan, Hariharsudan Sivaramakrishnan, van Nieuwenhuysen, Kris, Depauw, Valerie, Ramadan, Wedgan, Gordon, Ivan, Poortmans, Jef
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2014
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4128828/
https://www.ncbi.nlm.nih.gov/pubmed/25136277
http://dx.doi.org/10.1186/1556-276X-9-348

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4128828/
https://www.ncbi.nlm.nih.gov/pubmed/25136277
http://dx.doi.org/10.1186/1556-276X-9-348

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