Fabrication of high-quality single-crystal Cu thin films using radio-frequency sputtering

Copper (Cu) thin films have been widely used as electrodes and interconnection wires in integrated electronic circuits, and more recently as substrates for the synthesis of graphene. However, the ultra-high vacuum processes required for high-quality Cu film fabrication, such as molecular beam epitax...

Descripción completa

Detalles Bibliográficos
Autores principales: Lee, Seunghun, Kim, Ji Young, Lee, Tae-Woo, Kim, Won-Kyung, Kim, Bum-Su, Park, Ji Hun, Bae, Jong-Seong, Cho, Yong Chan, Kim, Jungdae, Oh, Min-Wook, Hwang, Cheol Seong, Jeong, Se-Young
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4148649/
https://www.ncbi.nlm.nih.gov/pubmed/25169804
http://dx.doi.org/10.1038/srep06230

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4148649/
https://www.ncbi.nlm.nih.gov/pubmed/25169804
http://dx.doi.org/10.1038/srep06230

Ejemplares similares