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Effects of starting powder and thermal treatment on the aerosol deposited BaTiO(3) thin films toward less leakage currents
To prepare high-density integrated capacitors with low leakage currents, 0.2-μm-thick BaTiO(3) thin films were successfully deposited on integrated semiconductor substrates at room temperature by the aerosol deposition (AD) method. In this study, the effects of starting powder size were considered i...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2014
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4158356/ https://www.ncbi.nlm.nih.gov/pubmed/25246860 http://dx.doi.org/10.1186/1556-276X-9-435 |