Cargando…

Macroporous silicon for high-capacitance devices using metal electrodes

In this paper, high-capacity energy storage devices based on macroporous silicon are demonstrated. Small footprint devices with large specific capacitances up to 100 nF/mm(2), and an absolute capacitance above 15 μF, have been successfully fabricated using standard microelectronics and MEMS techniqu...

Descripción completa

Detalles Bibliográficos
Autores principales: Vega, Didac, Reina, Jordi, Martí, Ferran, Pavón, Ramón, Rodríguez, Ángel
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2014
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4165801/
https://www.ncbi.nlm.nih.gov/pubmed/25242906
http://dx.doi.org/10.1186/1556-276X-9-473