A Smart High Accuracy Silicon Piezoresistive Pressure Sensor Temperature Compensation System

Theoretical analysis in this paper indicates that the accuracy of a silicon piezoresistive pressure sensor is mainly affected by thermal drift, and varies nonlinearly with the temperature. Here, a smart temperature compensation system to reduce its effect on accuracy is proposed. Firstly, an effecti...

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Detalles Bibliográficos
Autores principales: Zhou, Guanwu, Zhao, Yulong, Guo, Fangfang, Xu, Wenju
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4168450/
https://www.ncbi.nlm.nih.gov/pubmed/25006998
http://dx.doi.org/10.3390/s140712174

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4168450/
https://www.ncbi.nlm.nih.gov/pubmed/25006998
http://dx.doi.org/10.3390/s140712174

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