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A Smart High Accuracy Silicon Piezoresistive Pressure Sensor Temperature Compensation System
Theoretical analysis in this paper indicates that the accuracy of a silicon piezoresistive pressure sensor is mainly affected by thermal drift, and varies nonlinearly with the temperature. Here, a smart temperature compensation system to reduce its effect on accuracy is proposed. Firstly, an effecti...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2014
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4168450/ https://www.ncbi.nlm.nih.gov/pubmed/25006998 http://dx.doi.org/10.3390/s140712174 |