An Acetone Microsensor with a Ring Oscillator Circuit Fabricated Using the Commercial 0.18 μm CMOS Process

This study investigates the fabrication and characterization of an acetone microsensor with a ring oscillator circuit using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The acetone microsensor contains a sensitive material, interdigitated electrodes and a polysilico...

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Detalles Bibliográficos
Autores principales: Yang, Ming-Zhi, Dai, Ching-Liang, Shih, Po-Jen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4168457/
https://www.ncbi.nlm.nih.gov/pubmed/25036331
http://dx.doi.org/10.3390/s140712735

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4168457/
https://www.ncbi.nlm.nih.gov/pubmed/25036331
http://dx.doi.org/10.3390/s140712735

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