Digital holographic microscopy based on a modified lateral shearing interferometer for three-dimensional visual inspection of nanoscale defects on transparent objects

A new type of digital holographic microscopy based on a modified lateral shearing interferometer (LSI) is proposed for the detection of micrometer- or nanometer-scale defects on transparent target objects. The LSI is an attractive interferometric test technique because of its simple configuration, b...

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Detalles Bibliográficos
Autores principales: Seo, Kwang-Beom, Kim, Byung-Mok, Kim, Eun-Soo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2014
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4171088/
https://www.ncbi.nlm.nih.gov/pubmed/25249822
http://dx.doi.org/10.1186/1556-276X-9-471

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4171088/
https://www.ncbi.nlm.nih.gov/pubmed/25249822
http://dx.doi.org/10.1186/1556-276X-9-471

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