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Effect of sulfur hexafluoride gas and post-annealing treatment for inductively coupled plasma etched barium titanate thin films

Aerosol deposition- (AD) derived barium titanate (BTO) micropatterns are etched via SF(6)/O(2)/Ar plasmas using inductively coupled plasma (ICP) etching technology. The reaction mechanisms of the sulfur hexafluoride on BTO thin films and the effects of annealing treatment are verified through X-ray...

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Detalles Bibliográficos
Autores principales:	Wang, Cong, Li, Yang, Yao, Zhao, Kim, Hong-Ki, Kim, Hyung-Jun, Kim, Nam-Young
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer 2014
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4171574/ https://www.ncbi.nlm.nih.gov/pubmed/25249824 http://dx.doi.org/10.1186/1556-276X-9-496

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