Ripple coarsening on ion beam-eroded surfaces

The temporal evolution of ripple pattern on Ge, Si, Al(2)O(3), and SiO(2) by low-energy ion beam erosion with Xe (+) ions is studied. The experiments focus on the ripple dynamics in a fluence range from 1.1 × 10(17) cm(-2) to 1.3 × 10(19) cm(-2) at ion incidence angles of 65° and 75° and ion energie...

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Detalles Bibliográficos
Autores principales: Teichmann, Marc, Lorbeer, Jan, Frost, Frank, Rauschenbach, Bernd
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2014
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4189778/
https://www.ncbi.nlm.nih.gov/pubmed/25302058
http://dx.doi.org/10.1186/1556-276X-9-439

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4189778/
https://www.ncbi.nlm.nih.gov/pubmed/25302058
http://dx.doi.org/10.1186/1556-276X-9-439

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