Theoretical Prediction of Experimental Jump and Pull-In Dynamics in a MEMS Sensor

The present research study deals with an electrically actuated MEMS device. An experimental investigation is performed, via frequency sweeps in a neighbourhood of the first natural frequency. Resonant behavior is explored, with special attention devoted to jump and pull-in dynamics. A theoretical si...

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Detalles Bibliográficos
Autores principales: Ruzziconi, Laura, Ramini, Abdallah H., Younis, Mohammad I., Lenci, Stefano
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4208215/
https://www.ncbi.nlm.nih.gov/pubmed/25225873
http://dx.doi.org/10.3390/s140917089

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4208215/
https://www.ncbi.nlm.nih.gov/pubmed/25225873
http://dx.doi.org/10.3390/s140917089

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