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Theoretical Prediction of Experimental Jump and Pull-In Dynamics in a MEMS Sensor
The present research study deals with an electrically actuated MEMS device. An experimental investigation is performed, via frequency sweeps in a neighbourhood of the first natural frequency. Resonant behavior is explored, with special attention devoted to jump and pull-in dynamics. A theoretical si...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2014
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4208215/ https://www.ncbi.nlm.nih.gov/pubmed/25225873 http://dx.doi.org/10.3390/s140917089 |