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Macropore formation in p-type silicon: toward the modeling of morphology

The formation of macropores in silicon during electrochemical etching processes has attracted much interest. Experimental evidences indicate that charge transport in silicon and in the electrolyte should realistically be taken into account in order to be able to describe the macropore morphology. Ho...

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Detalles Bibliográficos
Autores principales: Slimani, Amel, Iratni, Aicha, Henry, Hervé, Plapp, Mathis, Chazalviel, Jean-Noël, Ozanam, François, Gabouze, Noureddine
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2014
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4212238/
https://www.ncbi.nlm.nih.gov/pubmed/25386103
http://dx.doi.org/10.1186/1556-276X-9-585