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Macropore formation in p-type silicon: toward the modeling of morphology
The formation of macropores in silicon during electrochemical etching processes has attracted much interest. Experimental evidences indicate that charge transport in silicon and in the electrolyte should realistically be taken into account in order to be able to describe the macropore morphology. Ho...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4212238/ https://www.ncbi.nlm.nih.gov/pubmed/25386103 http://dx.doi.org/10.1186/1556-276X-9-585 |