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Enhanced quantification for 3D SEM–EDS: Using the full set of available X-ray lines
An enhanced method to quantify energy dispersive spectra recorded in 3D with a scanning electron microscope (3D SEM–EDS) has been previously demonstrated. This paper presents an extension of this method using all the available X-ray lines generated by the beam. The extended method benefits from usin...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Elsevier
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4266451/ https://www.ncbi.nlm.nih.gov/pubmed/25461593 http://dx.doi.org/10.1016/j.ultramic.2014.10.010 |