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Enhanced quantification for 3D SEM–EDS: Using the full set of available X-ray lines

An enhanced method to quantify energy dispersive spectra recorded in 3D with a scanning electron microscope (3D SEM–EDS) has been previously demonstrated. This paper presents an extension of this method using all the available X-ray lines generated by the beam. The extended method benefits from usin...

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Detalles Bibliográficos
Autores principales: Burdet, Pierre, Croxall, S.A., Midgley, P.A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4266451/
https://www.ncbi.nlm.nih.gov/pubmed/25461593
http://dx.doi.org/10.1016/j.ultramic.2014.10.010