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Gas sensing properties of nanocrystalline diamond at room temperature
This study describes an integrated NH(3) sensor based on a hydrogenated nanocrystalline diamond (NCD)-sensitive layer coated on an interdigitated electrode structure. The gas sensing properties of the sensor structure were examined using a reducing gas (NH(3)) at room temperature and were found to b...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Beilstein-Institut
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4273209/ https://www.ncbi.nlm.nih.gov/pubmed/25551062 http://dx.doi.org/10.3762/bjnano.5.243 |