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Characterization and density control of GaN nanodots on Si (111) by droplet epitaxy using plasma-assisted molecular beam epitaxy
In this report, self-organized GaN nanodots have been grown on Si (111) by droplet epitaxy method, and their density can be controlled from 1.1 × 10(10) to 1.1 × 10(11) cm(-2) by various growth parameters, such as substrate temperatures for Ga droplet formation, the pre-nitridation treatment of Si s...
Autores principales: | Yu, Ing-Song, Chang, Chun-Pu, Yang, Chung-Pei, Lin, Chun-Ting, Ma, Yuan-Ron, Chen, Chun-Chi |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4275119/ https://www.ncbi.nlm.nih.gov/pubmed/25593560 http://dx.doi.org/10.1186/1556-276X-9-682 |
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