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A Study of the Effect of the Fringe Fields on the Electrostatic Force in Vertical Comb Drives
The equation that describes the relationship between the applied voltage and the resulting electrostatic force within comb drives is often used to assist in choosing the dimensions for their design. This paper re-examines how some of these dimensions—particularly the cross-sectional dimensions of th...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4279475/ https://www.ncbi.nlm.nih.gov/pubmed/25350504 http://dx.doi.org/10.3390/s141120149 |