Design and Application of Quadrature Compensation Patterns in Bulk Silicon Micro-Gyroscopes

This paper focuses on the detailed design issues of a peculiar quadrature reduction method named system stiffness matrix diagonalization, whose key technology is the design and application of quadrature compensation patterns. For bulk silicon micro-gyroscopes, a complete design and application case...

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Detalles Bibliográficos
Autores principales: Ni, Yunfang, Li, Hongsheng, Huang, Libin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4279491/
https://www.ncbi.nlm.nih.gov/pubmed/25356646
http://dx.doi.org/10.3390/s141120419

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4279491/
https://www.ncbi.nlm.nih.gov/pubmed/25356646
http://dx.doi.org/10.3390/s141120419

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