A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection (†)

In order to effectively increase the resonance frequency and the quality factor of atomic force microscope (AFM) probes, a novel oscillating probe based on a dog-bone shaped MEMS resonator was conceived, designed, fabricated and evaluated. The novel probe with 400 μm in length, 100 μm in width and 5...

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Detalles Bibliográficos
Autores principales: Xiong, Zhuang, Mairiaux, Estelle, Walter, Benjamin, Faucher, Marc, Buchaillot, Lionel, Legrand, Bernard
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4279505/
https://www.ncbi.nlm.nih.gov/pubmed/25365463
http://dx.doi.org/10.3390/s141120667

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4279505/
https://www.ncbi.nlm.nih.gov/pubmed/25365463
http://dx.doi.org/10.3390/s141120667

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