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A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection (†)
In order to effectively increase the resonance frequency and the quality factor of atomic force microscope (AFM) probes, a novel oscillating probe based on a dog-bone shaped MEMS resonator was conceived, designed, fabricated and evaluated. The novel probe with 400 μm in length, 100 μm in width and 5...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2014
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4279505/ https://www.ncbi.nlm.nih.gov/pubmed/25365463 http://dx.doi.org/10.3390/s141120667 |