Development of a Piezoelectric Vacuum Sensing Component for a Wide Pressure Range

In this study, we develop a clamped–clamped beam-type piezoelectric vacuum pressure sensing element. The clamped–clamped piezoelectric beam is composed of a PZT layer and a copper substrate. A pair of electrodes is set near each end. An input voltage is applied to a pair of electrodes to vibrate the...

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Detalles Bibliográficos
Autores principales: Wang, Bing-Yu, Hsieh, Fan-Chun, Lin, Che-Yu, Chen, Shao-En, Chen, Fong-Zhi, Wu, Chia-Che
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4279579/
https://www.ncbi.nlm.nih.gov/pubmed/25421736
http://dx.doi.org/10.3390/s141122099

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4279579/
https://www.ncbi.nlm.nih.gov/pubmed/25421736
http://dx.doi.org/10.3390/s141122099

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