Cargando…

Development of a Piezoelectric Vacuum Sensing Component for a Wide Pressure Range

In this study, we develop a clamped–clamped beam-type piezoelectric vacuum pressure sensing element. The clamped–clamped piezoelectric beam is composed of a PZT layer and a copper substrate. A pair of electrodes is set near each end. An input voltage is applied to a pair of electrodes to vibrate the...

Descripción completa

Detalles Bibliográficos
Autores principales: Wang, Bing-Yu, Hsieh, Fan-Chun, Lin, Che-Yu, Chen, Shao-En, Chen, Fong-Zhi, Wu, Chia-Che
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4279579/
https://www.ncbi.nlm.nih.gov/pubmed/25421736
http://dx.doi.org/10.3390/s141122099
Descripción
Sumario:In this study, we develop a clamped–clamped beam-type piezoelectric vacuum pressure sensing element. The clamped–clamped piezoelectric beam is composed of a PZT layer and a copper substrate. A pair of electrodes is set near each end. An input voltage is applied to a pair of electrodes to vibrate the piezoelectric beam, and the output voltage is measured at the other pair. Because the viscous forces on the piezoelectric beam vary at different air pressures, the vibration of the beam depends on the vacuum pressure. The developed pressure sensor can sense a wide range of pressure, from 6.5 × 10(−6) to 760 Torr. The experimental results showed that the output voltage is inversely proportional to the gas damping ratio, and thus, the vacuum pressure was estimated from the output voltage.