Crossed ring anchored disk resonator for self-alignment of the anchor

Misalignment is a problematic challenge in RF MEMS resonators. It causes asymmetry in the ultra symmetric radial contour mode disk resonators and degrades their performance by increasing the insertion loss and decreasing their quality factors (Q). Self-alignment method seems to be a good solution fo...

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Detalles Bibliográficos
Autores principales: Baghelani, Masoud, Ghavifekr, Habib Badri, Ebrahimi, Afshin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2014
Materias:
Original Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4294740/
https://www.ncbi.nlm.nih.gov/pubmed/25685477
http://dx.doi.org/10.1016/j.jare.2013.01.001

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4294740/
https://www.ncbi.nlm.nih.gov/pubmed/25685477
http://dx.doi.org/10.1016/j.jare.2013.01.001

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