Nanofabrication on unconventional substrates using transferred hard masks

A major challenge in nanofabrication is to pattern unconventional substrates that cannot be processed for a variety of reasons, such as incompatibility with spin coating, electron beam lithography, optical lithography, or wet chemical steps. Here, we present a versatile nanofabrication method based...

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Detalles Bibliográficos
Autores principales: Li, Luozhou, Bayn, Igal, Lu, Ming, Nam, Chang-Yong, Schröder, Tim, Stein, Aaron, Harris, Nicholas C., Englund, Dirk
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4295112/
https://www.ncbi.nlm.nih.gov/pubmed/25588550
http://dx.doi.org/10.1038/srep07802

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4295112/
https://www.ncbi.nlm.nih.gov/pubmed/25588550
http://dx.doi.org/10.1038/srep07802

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