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Investigation on Blind Tip Reconstruction Errors Caused by Sample Features

Precision measurements of a nanoscale sample surface using an atomic force microscope (AFM) require a precise quantitative knowledge of the 3D tip shape. Blind tip reconstruction (BTR), established by Villarrubia, gives an outer bound with larger errors if the tip characterizer is not appropriate. I...

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Detalles Bibliográficos
Autores principales: Wan, Jiahuan, Xu, Linyan, Wu, Sen, Hu, Xiaodong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4299057/
https://www.ncbi.nlm.nih.gov/pubmed/25490584
http://dx.doi.org/10.3390/s141223159