Boosting the local anodic oxidation of silicon through carbon nanofiber atomic force microscopy probes

Many nanofabrication methods based on scanning probe microscopy have been developed during the last decades. Local anodic oxidation (LAO) is one of such methods: Upon application of an electric field between tip and surface under ambient conditions, oxide patterning with nanometer-scale resolution c...

Descripción completa

Detalles Bibliográficos
Autores principales: Rius, Gemma, Lorenzoni, Matteo, Matsui, Soichiro, Tanemura, Masaki, Perez-Murano, Francesc
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2015
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4311679/
https://www.ncbi.nlm.nih.gov/pubmed/25671165
http://dx.doi.org/10.3762/bjnano.6.20

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4311679/
https://www.ncbi.nlm.nih.gov/pubmed/25671165
http://dx.doi.org/10.3762/bjnano.6.20

Ejemplares similares