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Performance Comparison of Cross-Like Hall Plates with Different Covering Layers
This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The ef...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4327042/ https://www.ncbi.nlm.nih.gov/pubmed/25559001 http://dx.doi.org/10.3390/s150100672 |