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Performance Comparison of Cross-Like Hall Plates with Different Covering Layers

This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The ef...

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Detalles Bibliográficos
Autores principales:	Lyu, Fei, Zhang, Zhenyan, Toh, Eng-Huat, Liu, Xinfu, Ding, Yinjie, Pan, Yifan, Li, Chengjie, Li, Li, Sha, Jin, Pan, Hongbing
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2014
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4327042/ https://www.ncbi.nlm.nih.gov/pubmed/25559001 http://dx.doi.org/10.3390/s150100672

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