A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness

Presented in the paper is the design, the simulation, the fabrication and the experiment of a new z-axis resonant accelerometer based on the electrostatic stiffness. The new z-axis resonant micro-accelerometer, which consists of a torsional accelerometer and two plane resonators, decouples the sensi...

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Detalles Bibliográficos
Autores principales: Yang, Bo, Wang, Xingjun, Dai, Bo, Liu, Xiaojun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4327043/
https://www.ncbi.nlm.nih.gov/pubmed/25569748
http://dx.doi.org/10.3390/s150100687

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4327043/
https://www.ncbi.nlm.nih.gov/pubmed/25569748
http://dx.doi.org/10.3390/s150100687

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