Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique

The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro-mechanical system (MEMS) technique are investigated. The ethanol sensor is made up of a heater, a sensitive film and interdigitated e...

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Detalles Bibliográficos
Autores principales: Yang, Ming-Zhi, Dai, Ching-Liang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4327095/
https://www.ncbi.nlm.nih.gov/pubmed/25594598
http://dx.doi.org/10.3390/s150101623

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4327095/
https://www.ncbi.nlm.nih.gov/pubmed/25594598
http://dx.doi.org/10.3390/s150101623

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