Cargando…

Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique

The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro-mechanical system (MEMS) technique are investigated. The ethanol sensor is made up of a heater, a sensitive film and interdigitated e...

Descripción completa

Detalles Bibliográficos
Autores principales: Yang, Ming-Zhi, Dai, Ching-Liang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4327095/
https://www.ncbi.nlm.nih.gov/pubmed/25594598
http://dx.doi.org/10.3390/s150101623
_version_ 1782357012636499968
author Yang, Ming-Zhi
Dai, Ching-Liang
author_facet Yang, Ming-Zhi
Dai, Ching-Liang
author_sort Yang, Ming-Zhi
collection PubMed
description The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro-mechanical system (MEMS) technique are investigated. The ethanol sensor is made up of a heater, a sensitive film and interdigitated electrodes. The sensitive film is tin dioxide that is prepared by the sol-gel method. The heater is located under the interdigitated electrodes, and the sensitive film is coated on the interdigitated electrodes. The sensitive film needs a working temperature of 220 °C. The heater is employed to provide the working temperature of sensitive film. The sensor generates a change in capacitance when the sensitive film senses ethanol gas. A readout circuit is used to convert the capacitance variation of the sensor into the output frequency. Experiments show that the sensitivity of the ethanol sensor is 0.9 MHz/ppm.
format Online
Article
Text
id pubmed-4327095
institution National Center for Biotechnology Information
language English
publishDate 2015
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-43270952015-02-23 Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique Yang, Ming-Zhi Dai, Ching-Liang Sensors (Basel) Article The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro-mechanical system (MEMS) technique are investigated. The ethanol sensor is made up of a heater, a sensitive film and interdigitated electrodes. The sensitive film is tin dioxide that is prepared by the sol-gel method. The heater is located under the interdigitated electrodes, and the sensitive film is coated on the interdigitated electrodes. The sensitive film needs a working temperature of 220 °C. The heater is employed to provide the working temperature of sensitive film. The sensor generates a change in capacitance when the sensitive film senses ethanol gas. A readout circuit is used to convert the capacitance variation of the sensor into the output frequency. Experiments show that the sensitivity of the ethanol sensor is 0.9 MHz/ppm. MDPI 2015-01-14 /pmc/articles/PMC4327095/ /pubmed/25594598 http://dx.doi.org/10.3390/s150101623 Text en © 2015 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Yang, Ming-Zhi
Dai, Ching-Liang
Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
title Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
title_full Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
title_fullStr Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
title_full_unstemmed Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
title_short Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
title_sort ethanol microsensors with a readout circuit manufactured using the cmos-mems technique
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4327095/
https://www.ncbi.nlm.nih.gov/pubmed/25594598
http://dx.doi.org/10.3390/s150101623
work_keys_str_mv AT yangmingzhi ethanolmicrosensorswithareadoutcircuitmanufacturedusingthecmosmemstechnique
AT daichingliang ethanolmicrosensorswithareadoutcircuitmanufacturedusingthecmosmemstechnique