Cargando…

Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique

The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro-mechanical system (MEMS) technique are investigated. The ethanol sensor is made up of a heater, a sensitive film and interdigitated e...

Descripción completa

Detalles Bibliográficos
Autores principales:	Yang, Ming-Zhi, Dai, Ching-Liang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2015
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4327095/ https://www.ncbi.nlm.nih.gov/pubmed/25594598 http://dx.doi.org/10.3390/s150101623

Ejemplares similares

Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors
por: Hsieh, Chen-Hsuan, et al.
Publicado: (2013)

5A Zirconium Dioxide Ammonia Microsensor Integrated with a Readout Circuit Manufactured Using the 0.18 μm CMOS Process
por: Lin, Guan-Ming, et al.
Publicado: (2013)

Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique
por: Liu, Mao-Chen, et al.
Publicado: (2009)

Manufacture and Characterization of High Q-Factor Inductors Based on CMOS-MEMS Techniques
por: Yang, Ming-Zhi, et al.
Publicado: (2011)

Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique
por: Kao, Pin-Hsu, et al.
Publicado: (2009)

A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip
por: Yang, Ming-Zhi, et al.
Publicado: (2011)

An Acetone Microsensor with a Ring Oscillator Circuit Fabricated Using the Commercial 0.18 μm CMOS Process
por: Yang, Ming-Zhi, et al.
Publicado: (2014)

Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS–MEMS Technique
por: Shen, Wei-Chun, et al.
Publicado: (2020)

Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems
por: Kim, Jong-Wan, et al.
Publicado: (2007)

A VCO-Based CMOS Readout Circuit for Capacitive MEMS Microphones
por: Quintero, Andres, et al.
Publicado: (2019)

Thermoelectric Energy Micro Harvesters with Temperature Sensors Manufactured Utilizing the CMOS-MEMS Technique
por: Shen, Yi-Xuan, et al.
Publicado: (2022)

Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors
por: Baù, Marco, et al.
Publicado: (2020)

Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
por: Fong, Chien-Fu, et al.
Publicado: (2015)

A Scalable and Low Stress Post-CMOS Processing Technique for Implantable Microsensors
por: Lee, Ah-Hyoung, et al.
Publicado: (2020)

A Readout Circuit for MEMS Gas Sensor
por: Ren, Shengle, et al.
Publicado: (2023)

Fabrication and Characterization of Polyaniline/PVA Humidity Microsensors
por: Yang, Ming-Zhi, et al.
Publicado: (2011)

Fully Integrated Low-Noise Readout Circuit with Automatic Offset Cancellation Loop for Capacitive Microsensors
por: Song, Haryong, et al.
Publicado: (2015)

Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators
por: Kao, Pin-Hsu, et al.
Publicado: (2010)

Monolithic Low Noise and Low Zero-g Offset CMOS/MEMS Accelerometer Readout Scheme
por: Liu, Yu-Sian, et al.
Publicado: (2018)

Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process
por: Liao, Wei-Zhen, et al.
Publicado: (2013)

Differential Wide Temperature Range CMOS Interface Circuit for Capacitive MEMS Pressure Sensors
por: Wang, Yucai, et al.
Publicado: (2015)

Metamaterial-enhanced near-field readout platform for passive microsensor tags
por: Wu, Ke, et al.
Publicado: (2022)

A Zero Suppression Micro-Circuit for Binary Readout CMOS Monolithic Sensors
por: Himmi, A, et al.
Publicado: (2009)

A CMOS Image Readout Circuit with On-Chip Defective Pixel Detection and Correction
por: López-Portilla, Bárbaro M., et al.
Publicado: (2023)

A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments
por: Tan, Qiulin, et al.
Publicado: (2013)

Design of Readout Circuit with Quadrature Error and Auxiliary PLL for MEMS Vibratory Gyroscope
por: Chen, Hua, et al.
Publicado: (2020)

CMOS MEMS Fabrication Technologies and Devices
por: Qu, Hongwei
Publicado: (2016)

Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process
por: Tseng, Jian-Zhi, et al.
Publicado: (2014)

Temporal Noise Analysis of Charge-Domain Sampling Readout Circuits for CMOS Image Sensors †
por: Ge, Xiaoliang, et al.
Publicado: (2018)

A Biosensor-CMOS Platform and Integrated Readout Circuit in 0.18-μm CMOS Technology for Cancer Biomarker Detection
por: Alhoshany, Abdulaziz, et al.
Publicado: (2017)

Editorial for the Special Issue on Interface Circuits for Microsensor Integrated Systems
por: Ferri, Giuseppe, et al.
Publicado: (2018)

Fast CMOS transimpedance amplifier and comparator circuit for readout of silicon strip detectors at LHC experiments
por: Kaplon, J, et al.
Publicado: (2002)

Measurements of transistors and silicon microstrip detector readout circuits in the Harris AVLSIRA radiation hard CMOS process
por: Raymond, M, et al.
Publicado: (1994)

Manufacturing and Characterization of Three-Axis Magnetic Sensors Using the Standard 180 nm CMOS Technology
por: Wu, Chi-Han, et al.
Publicado: (2021)

Micro Magnetic Field Sensors Manufactured Using a Standard 0.18-μm CMOS Process
por: Lin, Yen-Nan, et al.
Publicado: (2018)

Fabrication and Characterization of a CMOS-MEMS Humidity Sensor
por: Dennis, John-Ojur, et al.
Publicado: (2015)

Poly-SiGe for MEMS-above-CMOS sensors
por: Gonzalez Ruiz, Pilar, et al.
Publicado: (2014)

Implementation of a CMOS/MEMS Accelerometer with ASIC Processes
por: Liu, Yu-Sian, et al.
Publicado: (2019)

Manufacturing and Testing of Radio Frequency MEMS Switches Using the Complementary Metal Oxide Semiconductor Process
por: Tsai, Zung-You, et al.
Publicado: (2021)

Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip
por: Hu, Yu-Chih, et al.
Publicado: (2014)

Cannot write session to /tmp/vufind_sessions/sess_shrdpvo532hqmn4foorjhmkv15