UV sensing using film bulk acoustic resonators based on Au/n-ZnO/piezoelectric-ZnO/Al structure

A new type of ultraviolet (UV) light sensor based on film bulk acoustic wave resonator (FBAR) is proposed. The new sensor uses gold and a thin n-type ZnO layer deposited on the top of piezoelectric layer of FBAR to form a Schottky barrier. The Schottky barrier's capacitance can be changed with...

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Detalles Bibliográficos
Autores principales: Bian, Xiaolei, Jin, Hao, Wang, Xiaozhi, Dong, Shurong, Chen, Guohao, Luo, J. K., Deen, M. Jamal, Qi, Bensheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4360626/
https://www.ncbi.nlm.nih.gov/pubmed/25773146
http://dx.doi.org/10.1038/srep09123

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4360626/
https://www.ncbi.nlm.nih.gov/pubmed/25773146
http://dx.doi.org/10.1038/srep09123

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