Cargando…

The reason why thin-film silicon grows layer by layer in plasma-enhanced chemical vapor deposition

Thin-film Si grows layer by layer on Si(001)-(2 × 1):H in plasma-enhanced chemical vapor deposition. Here we investigate the reason why this occurs by using quantum chemical molecular dynamics and density functional theory calculations. We propose a dangling bond (DB) diffusion model as an alternati...

Descripción completa

Detalles Bibliográficos
Autores principales:	Kuwahara, Takuya, Ito, Hiroshi, Kawaguchi, Kentaro, Higuchi, Yuji, Ozawa, Nobuki, Kubo, Momoji
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group 2015
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4360731/ https://www.ncbi.nlm.nih.gov/pubmed/25772469 http://dx.doi.org/10.1038/srep09052

Ejemplares similares

Large-Area Growth of Uniform Single-Layer MoS(2) Thin Films by Chemical Vapor Deposition
por: Baek, Seung Hyun, et al.
Publicado: (2015)

Breaking the Saturated Vapor Layer with a Thin Porous Membrane
por: Zhang, Yaoling, et al.
Publicado: (2022)

Combinatorial Cu-Ni Alloy Thin-Film Catalysts for Layer Number Control in Chemical Vapor-Deposited Graphene
por: Khanna, Sumeer R., et al.
Publicado: (2022)

Preferentially oriented BaTiO(3) thin films deposited on silicon with thin intermediate buffer layers
por: George, John P, et al.
Publicado: (2013)

ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition
por: Kia, Alireza M., et al.
Publicado: (2019)

Why Sonochemistry in a Thin Layer? Constructive Interference
por: Parr IV, Daniel L., et al.
Publicado: (2023)

Non‐Empirical Law for Nanoscale Atom‐by‐Atom Wear
por: Wang, Yang, et al.
Publicado: (2020)

Mechanisms of chemical-reaction-induced tensile deformation of an Fe/Ni/Cr alloy revealed by reactive atomistic simulations
por: Wang, Yang, et al.
Publicado: (2023)

Physical vapor deposition of thin films
por: Mahan, John E
Publicado: (2000)

Atomic Layer Deposition of Silicon Nitride Thin Films: A Review of Recent Progress, Challenges, and Outlooks
por: Meng, Xin, et al.
Publicado: (2016)

Investigation of electronic properties of chemical vapor deposition grown single layer graphene via doping of thin transparent conductive films
por: Singh, Anand Kumar, et al.
Publicado: (2021)

Surface Passivation of Silicon Using HfO(2) Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
por: Zhang, Xiao-Ying, et al.
Publicado: (2017)

Controlling interlayer excitons in MoS(2) layers grown by chemical vapor deposition
por: Paradisanos, Ioannis, et al.
Publicado: (2020)

Controlled synthesis of few-layer SnSe(2) by chemical vapor deposition
por: An, Boxing, et al.
Publicado: (2020)

Modification of Nanofiber Support Layer for Thin Film Composite Forward Osmosis Membranes via Layer-by-Layer Polyelectrolyte Deposition
por: Gonzales, Ralph Rolly, et al.
Publicado: (2018)

Advanced Silicon-on-Insulator: Crystalline Silicon on Atomic Layer Deposited Beryllium Oxide
por: Min Lee, Seung, et al.
Publicado: (2017)

Thin-film organic photonics: molecular layer deposition and applications
por: Yoshimura, Tetsuzo
Publicado: (2011)

Characterization of silicon detectors with thin dead-layers on the n-side
por: Avset, B S, et al.
Publicado: (1998)

Spatioselective Deposition of Passivating and Electrocatalytic Layers on Silicon Nanowire Arrays
por: Wendisch, Fedja J., et al.
Publicado: (2020)

Controlled Synthesis of Atomically Layered Hexagonal Boron Nitride via Chemical Vapor Deposition
por: Liu, Juanjuan, et al.
Publicado: (2016)

Low-Humidity Sensing Properties of Multi-Layered Graphene Grown by Chemical Vapor Deposition
por: Ricciardella, Filiberto, et al.
Publicado: (2020)

Direct chemical vapor deposition synthesis of large area single-layer brominated graphene
por: Hasan, Maria, et al.
Publicado: (2019)

Nano-oxide thin films deposited via atomic layer deposition on microchannel plates
por: Yan, Baojun, et al.
Publicado: (2015)

Synthesis of Atomically Thin h-BN Layers Using BCl(3) and NH(3) by Sequential-Pulsed Chemical Vapor Deposition on Cu Foil
por: Oh, Hongseok, et al.
Publicado: (2021)

Atomic Layer Deposition of Photoconductive Cu(2)O Thin Films
por: Iivonen, Tomi, et al.
Publicado: (2019)

Atomic and Molecular Layer Deposition of Alkali Metal Based Thin Films
por: Madadi, Milad, et al.
Publicado: (2021)

Oxidative chemical vapor deposition of polyaniline thin films
por: Smolin, Yuriy Y, et al.
Publicado: (2017)

Vapor deposition routes to conformal polymer thin films
por: Moni, Priya, et al.
Publicado: (2017)

Breakthrough to Non-Vacuum Deposition of Single-Crystal, Ultra-Thin, Homogeneous Nanoparticle Layers: A Better Alternative to Chemical Bath Deposition and Atomic Layer Deposition
por: Liao, Yu-Kuang, et al.
Publicado: (2017)

Bi-layer Channel AZO/ZnO Thin Film Transistors Fabricated by Atomic Layer Deposition Technique
por: Li, Huijin, et al.
Publicado: (2017)

Photoconductivities in monocrystalline layered V(2)O(5) nanowires grown by physical vapor deposition
por: Chen, Ruei-San, et al.
Publicado: (2013)

Robust Spin Interconnect with Isotropic Spin Dynamics in Chemical Vapor Deposited Graphene Layers and Boundaries
por: Khokhriakov, Dmitrii, et al.
Publicado: (2020)

Correction: Direct chemical vapor deposition synthesis of large area single-layer brominated graphene
por: Hasan, Maria, et al.
Publicado: (2019)

The Crystalline Structure of Thin Bismuth Layers Grown on Silicon (111) Substrates
por: Stanionytė, Sandra, et al.
Publicado: (2022)

Diamond-like carbon coating under oleic acid lubrication: Evidence for graphene oxide formation in superlow friction
por: De Barros Bouchet, Maria Isabel, et al.
Publicado: (2017)

Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition
por: Zhai, Chen-Hui, et al.
Publicado: (2016)

Photo-EMF Sensitivity of Porous Silicon Thin Layer–Crystalline Silicon Heterojunction to Ammonia Adsorption
por: Vashpanov, Yuriy, et al.
Publicado: (2011)

Niobium Nitride Thin Films deposited by High Temperature Chemical Vapor Deposition
por: Mercier, F
Publicado: (2014)

Thin film encapsulation for organic light-emitting diodes using inorganic/organic hybrid layers by atomic layer deposition
por: Zhang, Hao, et al.
Publicado: (2015)

Electrochemical deposition of layered copper thin films based on the diffusion limited aggregation
por: Wei, Chenhuinan, et al.
Publicado: (2016)

Cannot write session to /tmp/vufind_sessions/sess_5hchi6nu79hagl80sqt3fnt1br