Fundamental edge broadening effects during focused electron beam induced nanosynthesis

The present study explores lateral broadening effects of 3D structures fabricated through focused electron beam induced deposition using MeCpPt(IV)Me(3) precursor. In particular, the scaling behavior of proximity effects as a function of the primary electron energy and the deposit height is investig...

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Detalles Bibliográficos
Autores principales: Schmied, Roland, Fowlkes, Jason D, Winkler, Robert, Rack, Phillip D, Plank, Harald
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2015
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4362041/
https://www.ncbi.nlm.nih.gov/pubmed/25821687
http://dx.doi.org/10.3762/bjnano.6.47

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4362041/
https://www.ncbi.nlm.nih.gov/pubmed/25821687
http://dx.doi.org/10.3762/bjnano.6.47

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