Conformal SiO(2) coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition

Polycarbonate etched ion-track membranes with about 30 µm long and 50 nm wide cylindrical channels were conformally coated with SiO(2) by atomic layer deposition (ALD). The process was performed at 50 °C to avoid thermal damage to the polymer membrane. Analysis of the coated membranes by small angle...

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Detalles Bibliográficos
Autores principales: Sobel, Nicolas, Hess, Christian, Lukas, Manuela, Spende, Anne, Stühn, Bernd, Toimil-Molares, M E, Trautmann, Christina
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2015
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4362336/
https://www.ncbi.nlm.nih.gov/pubmed/25821688
http://dx.doi.org/10.3762/bjnano.6.48

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4362336/
https://www.ncbi.nlm.nih.gov/pubmed/25821688
http://dx.doi.org/10.3762/bjnano.6.48

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