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Conformal SiO(2) coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition

Polycarbonate etched ion-track membranes with about 30 µm long and 50 nm wide cylindrical channels were conformally coated with SiO(2) by atomic layer deposition (ALD). The process was performed at 50 °C to avoid thermal damage to the polymer membrane. Analysis of the coated membranes by small angle...

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Detalles Bibliográficos
Autores principales:	Sobel, Nicolas, Hess, Christian, Lukas, Manuela, Spende, Anne, Stühn, Bernd, Toimil-Molares, M E, Trautmann, Christina
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2015
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4362336/ https://www.ncbi.nlm.nih.gov/pubmed/25821688 http://dx.doi.org/10.3762/bjnano.6.48

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