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Light-Emitting Devices Based on Top-down Fabricated GaAs Quantum Nanodisks
Quantum dots photonic devices based on the III–V compound semiconductor technology offer low power consumption, temperature stability, and high-speed modulation. We fabricated GaAs nanodisks (NDs) of sub-20-nm diameters by a top-down process using a biotemplate and neutral beam etching (NBE). The Ga...
Autores principales: | , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4366859/ https://www.ncbi.nlm.nih.gov/pubmed/25792119 http://dx.doi.org/10.1038/srep09371 |