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Fabrication and Characterization of a Multichannel 3D Thermopile for Chip Calorimeter Applications

Thermal sensors based on thermopiles are some of the most robust and popular temperature sensing technologies across industries and research disciplines. A chip calorimeter with a 3D thermopile layout with a large sensing area and multichannel capacity has been developed, which is highly desired for...

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Detalles Bibliográficos
Autores principales: Huynh, Tho Phuoc, Zhang, Yilei, Yehuda, Cohen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4367362/
https://www.ncbi.nlm.nih.gov/pubmed/25654716
http://dx.doi.org/10.3390/s150203351