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Fabrication and Characterization of a Multichannel 3D Thermopile for Chip Calorimeter Applications
Thermal sensors based on thermopiles are some of the most robust and popular temperature sensing technologies across industries and research disciplines. A chip calorimeter with a 3D thermopile layout with a large sensing area and multichannel capacity has been developed, which is highly desired for...
Autores principales: | Huynh, Tho Phuoc, Zhang, Yilei, Yehuda, Cohen |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4367362/ https://www.ncbi.nlm.nih.gov/pubmed/25654716 http://dx.doi.org/10.3390/s150203351 |
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