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Crystallization dynamics and interface stability of strontium titanate thin films on silicon

Different physical vapor deposition methods have been used to fabricate strontium titanate thin films. Within the binary phase diagram of SrO and TiO(2) the stoichiometry ranges from Ti rich to Sr rich, respectively. The crystallization of these amorphous SrTiO(3) layers is investigated by in situ g...

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Detalles Bibliográficos
Autores principales: Hanzig, Florian, Hanzig, Juliane, Mehner, Erik, Richter, Carsten, Veselý, Jozef, Stöcker, Hartmut, Abendroth, Barbara, Motylenko, Mykhaylo, Klemm, Volker, Novikov, Dmitri, Meyer, Dirk C.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: International Union of Crystallography 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4379435/
https://www.ncbi.nlm.nih.gov/pubmed/25844077
http://dx.doi.org/10.1107/S160057671500240X