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Crystallization dynamics and interface stability of strontium titanate thin films on silicon
Different physical vapor deposition methods have been used to fabricate strontium titanate thin films. Within the binary phase diagram of SrO and TiO(2) the stoichiometry ranges from Ti rich to Sr rich, respectively. The crystallization of these amorphous SrTiO(3) layers is investigated by in situ g...
Autores principales: | , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
International Union of Crystallography
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4379435/ https://www.ncbi.nlm.nih.gov/pubmed/25844077 http://dx.doi.org/10.1107/S160057671500240X |