Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer

The film bulk acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, or as a gravimetric sensor for biochemical or physical sensing. Current device architectures require the use of an acoustic mirror or a freestanding membrane and are fabricated as discrete components....

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Detalles Bibliográficos
Autores principales: Chen, Guohao, Zhao, Xinru, Wang, Xiaozhi, Jin, Hao, Li, Shijian, Dong, Shurong, Flewitt, A. J., Milne, W. I., Luo, J. K.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4379503/
https://www.ncbi.nlm.nih.gov/pubmed/25824706
http://dx.doi.org/10.1038/srep09510

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4379503/
https://www.ncbi.nlm.nih.gov/pubmed/25824706
http://dx.doi.org/10.1038/srep09510

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